The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
Jul. 20, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Koichi Shimada, Oshu, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68792 (2013.01); C23C 16/4583 (2013.01); H01L 21/67303 (2013.01); H01L 21/67306 (2013.01); H01L 21/67745 (2013.01); H01L 21/67757 (2013.01); H01L 21/67069 (2013.01); H01L 21/67115 (2013.01); H01L 21/68785 (2013.01);
Abstract
A substrate processing apparatus includes: a first boat configured to hold substrates in a shelf shape; a second boat provided coaxially with the first boat and configured to hold substrates in a shelf shape; and a drive configured to rotate the first boat and the second boat in a synchronized manner and configured to raise and lower the second boat relative to the first boat.