The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
Apr. 01, 2022
Intel Corporation, Santa Clara, CA (US);
Xianghong Tong, Hillsboro, OR (US);
Martin Von Haartman, Portland, OR (US);
Wen-Hsien Chuang, Portland, OR (US);
Zhiyong Ma, Hillsboro, OR (US);
Hyuk Ju Ryu, Hillsboro, OR (US);
Prasoon Joshi, Hillsboro, OR (US);
May Ling Oh, Portland, OR (US);
Jennifer Huening, Hillsboro, OR (US);
Shuai Zhao, Beaverton, OR (US);
Charles Peterson, Hillsboro, OR (US);
Ira Jewell, Hillsboro, OR (US);
Hasan Faraby, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Pulsed beam prober systems, devices, and techniques are described herein related to providing a beam detection frequency that is less than a electrical test frequency. An electrical test signal at the electrical test frequency is provided to die under test. A pulsed beam is applied to the die such that the pulsed beam has packets of beam pulses or a frequency delta with respect to the electrical test frequency. The packets of beam pulses or the frequency delta elicits a detectable beam modulation in an imaging signal reflected from the die such that the imaging signal is modulated at a detection frequency less than the electrical test frequency.