The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
May. 19, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Sarathi Roy, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01B 11/27 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/706851 (2023.05); G01B 11/27 (2013.01); G03F 7/70633 (2013.01); G03F 7/70666 (2013.01); G03F 7/706839 (2023.05); G03F 9/7011 (2013.01); G03F 9/7046 (2013.01); G03F 9/7092 (2013.01);
Abstract
A method to determine a performance indicator indicative of alignment performance of a processed substrate. The method includes obtaining measurement data including a plurality of measured position values of alignment marks on the substrate and calculating a positional deviation between each measured position value and a respective expected position value. These positional deviations are used to determine a directional derivative between the alignment marks, and the directional derivatives are used to determine at least one directional derivative performance indicator.