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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12428347 B1

PDFFull Text
Date of Patent:
Sep. 30, 2025

Filed:

Aug. 10, 2022

Ceramic component and plasma etching apparatus comprising same

Applicant:

Solmics Co., Lid., Pyeongtaek-si, KR;

Inventors:

Surgsic Hwang, Seoul, KR;

Junrok Oh, Seoul, KR;

Kyungyeol Min, Yongin-si, KR;

Kyungin Kim, Hwaseong-si, KR;

Jungkun Kang, Pyeongtaek-si, KR;

Younguk Han, Pyeongtaek-si, KR;

Assignee:

Solmics Co., Ltd., Pyeongtaek-si, KR;

Attorney:

NSIP Law

Primary Examiner:

Jeffrey D Washville

Int. Cl.
CPC ...
C04B 35/563 (2006.01); C04B 35/626 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); H01J 37/32 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
C04B 35/563 (2013.01); C04B 35/6261 (2013.01); C04B 41/5027 (2013.01); C04B 41/5058 (2013.01); C04B 41/87 (2013.01); H01J 37/32642 (2013.01); H01L 21/3065 (2013.01); C04B 2235/3821 (2013.01); C04B 2235/5436 (2013.01);
Abstract

A ceramic component included in a plasma etching apparatus, wherein a surface of the ceramic component may include a base material and a composite material disposed in contact with the base material, wherein a resistivity of the ceramic component may be 10Ω·cm to 20 Ω·cm, and wherein the base material may include a first boron carbide-based material and the composite material may include at least one selected from the group consisting of a second boron carbide-based material, a carbon-based material, and combinations thereof, is disclosed.

Find Patent Forward Citations

Hwang, Surgsic. (2025). Ceramic component and plasma etching apparatus comprising same (U.S. Patent No. 12428347). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12428347

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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