The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
Apr. 03, 2023
Applicant:
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Inventors:
Cheng-Ping Chen, Taichung, TW;
Shih-Chung Chen, Hsinchu, TW;
Sheng-Tai Peng, Miaoli County, TW;
Hung-Lin Chen, Pingtung, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); B24B 37/20 (2012.01); B24D 13/10 (2006.01); B24D 13/14 (2006.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B24B 37/20 (2013.01); B24D 13/10 (2013.01); B24D 13/145 (2013.01);
Abstract
A polishing pad conditioning apparatus includes a base, a fiber, and a polymer protruding from a surface of the base and encompassing the fiber.