The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Jul. 15, 2020
Applicant:
Evatec Ag, Trübbach, CH;
Inventors:
Assignee:
EVATEC AG, Trübbach, CH;
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/076 (2023.01); C01B 21/06 (2006.01); C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); H10N 30/00 (2023.01); H10N 30/079 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
H10N 30/076 (2023.02); C01B 21/0602 (2013.01); C23C 14/0042 (2013.01); C23C 14/024 (2013.01); C23C 14/0617 (2013.01); C23C 14/3464 (2013.01); H10N 30/079 (2023.02); H10N 30/708 (2024.05); H10N 30/853 (2023.02); C01P 2006/40 (2013.01);
Abstract
A substrate having a surface coated with a piezoelectric coating I, the coating including A-xMexN, wherein A is at least one of B, Al, Ga, In, Tl, and Me is at least one metallic element Me from the transition metal groups 3b, 4b, 5b 6b the lanthanides, and Mg the coating I having a thickness d, and further including a transition layer wherein the ratio of atomic percentage of Me to atomic percentage of Al steadily rises along a thickness extent δ3 of said coating for which there is valid:δ3≤