The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Sep. 30, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Zhaopei Cui, Hefei, CN;
Ying Song, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
A semiconductor structure includes a substrate, wire structures, support structures and storage node contact structures. Each wire structure includes a wire and an isolation structure located on the wire. The wire structures extend along a first direction. The support structures are located on a side of the wire structures away from the substrate. The support structures are arranged at intervals in the first direction and connected with the isolation structures. The support structures extend along a second direction, and the second direction intersects with the first direction. The storage node contact structures are arranged in contact holes, and each of the contact holes is located within adjacent wire structures and adjacent support structures. A first air gap structure is provided between each of the storage node contact structures and a wire structure adjacent to the storage node contact structure.