The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

Dec. 13, 2019
Applicant:

Board of Regents, the University of Texas System, Austin, TX (US);

Inventors:

Sidlgata V. Sreenivasan, Austin, TX (US);

Shrawan Singhal, Austin, TX (US);

Lawrence R. Dunn, Austin, TX (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G03F 7/00 (2006.01); G03F 7/16 (2006.01); G05B 13/04 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G03F 7/0002 (2013.01); G03F 7/16 (2013.01); G05B 13/042 (2013.01); H01L 21/31051 (2013.01);
Abstract

Various embodiments of the present technology generally relate to substrate planarization. More specifically, some embodiments of the present technology relate a versatile systems and methods for precision surface topography optimization known as planarization on nominally planar substrates. In some embodiments, a method for planarization of a patterned substrate using inkjets can determine the global and nanoscale topography and pattern information of the patterned substrate. Based upon the global and nanoscale topography and pattern information, a drop pattern can be determined and then dispensed on the patterned substrate. A gap between the patterned substrate and a superstrate causing the dispensed drops can be closed to form a substantially contiguous film. The substantially contiguous film can be cured and the superstrate can be separated from the patterned substrate with substantially contiguous film on the patterned substrate.


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