The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

Mar. 18, 2020
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Masaaki Nagase, Osaka, JP;

Keiichi Hasegawa, Osaka, JP;

Kouji Nishino, Osaka, JP;

Nobukazu Ikeda, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01N 21/33 (2006.01); G01N 21/3504 (2014.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); G01N 21/33 (2013.01); G01N 21/3504 (2013.01);
Abstract

A concentration measurement devicefor measuring the concentration of the a gas flowing through a junction blockconnected to a plurality of gas supply lines includes a light sourcefor generating light incident to a flow path formed in the junction block, a photodetectorfor receiving light emitting from the flow path, and an arithmetic control circuitfor determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windowsandfor making light from the light source incident to the flow path and, at least one of the translucent emitting windowsandfor emitting light passing through the flow path being sealed and fixed to the junction block


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