The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
May. 16, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Sven Schramm, Kahl am Main, DE;
Martin Hilkene, Gilroy, CA (US);
Elias Martinez, San Jose, CA (US);
Amir Bayati, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/3577 (2014.01); G01N 21/25 (2006.01); G01N 21/64 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3577 (2013.01); G01N 21/255 (2013.01); G01N 2021/6471 (2013.01); G01N 2201/0238 (2013.01);
Abstract
Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection module further comprises a detector optically coupled to the optical bandpass filter.