The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Nov. 09, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Colin C. Neikirk, Mountain View, CA (US);
Pravin K. Narwankar, Sunnyvale, CA (US);
Kaushal Gangakhedkar, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Cupertino, CA (US);
Jonathan Frankel, Los Gatos, CA (US);
David Masayuki Ishikawa, Mountain View, CA (US);
Quoc Truong, San Ramon, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.