The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2025
Filed:
Apr. 09, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Jing Jiang, Santa Clara, CA (US);
Jinxin Fu, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments described herein provide for methods of forming optical device structures having continuously increasing or decreasing duty cycles. One embodiment includes a device. The device includes a plurality of optical device structures. Each optical device structure of the plurality of optical device structures includes a plurality of discrete zones. Each discrete zone of the plurality of discrete zones has a critical dimension. The device further includes a plurality of transition zones disposed between two discrete zones of the plurality of discrete zones. The critical dimension of each transition zone of the plurality of transition zones continuously increases or decreases across a length of each optical device structure of the plurality of optical device structures.