The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2025
Filed:
Sep. 16, 2022
Applicant:
Sumitomo Electric Industries, Ltd., Osaka, JP;
Inventors:
Makoto Kiyama, Osaka, JP;
Yoshihiro Saito, Osaka, JP;
Yutaka Hoshina, Osaka, JP;
Yojiro Nakayama, Osaka, JP;
Assignee:
Sumitomo Electric Industries, Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/26 (2006.01); C30B 29/42 (2006.01); C30B 33/00 (2006.01); H01L 21/02 (2006.01); H10D 62/85 (2025.01);
U.S. Cl.
CPC ...
C30B 29/42 (2013.01); B32B 3/26 (2013.01); C30B 33/00 (2013.01); H01L 21/02052 (2013.01); H10D 62/85 (2025.01);
Abstract
A gallium arsenide single crystal substrate includes a main surface having a circular shape and has a first integrated intensity ratio or a second integrated intensity ratio. The first integrated intensity ratio and the second integrated intensity ratio are obtained from a spectrum, based on a predetermined X-ray photoelectron spectroscopy, of each of arsenic and gallium. The number of particles each having a major axis of 0.16 μm or more is 2 or less per cmof the main surface.