The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2025
Filed:
Feb. 26, 2020
Tokyo Electron Limited, Tokyo, JP;
Hirotoshi Mori, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing apparatus includes an imaging device configured to image a first substrate held by a holder; a modifying device configured to form a modification layer by radiating laser light to an inside of the first substrate held by the holder along a boundary between a peripheral portion of the first substrate as a removing target and a central portion thereof; a first moving device configured to move the holder and the imaging device relatively; and a controller configured to control the holder, the imaging device, the modifying device, and the first moving device. The controller controls the holder, the imaging device and the first moving device to perform the focus adjustment of the imaging device and/or the imaging by the imaging device while moving the holder and the imaging device relatively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile