The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
May. 10, 2021
Asml Netherlands B.v., Veldhoven, NL;
José Nilton Fonseca Junior, Hamburg, DE;
Zhuangxiong Huang, Eindhoven, NL;
Franciscus Johannes Leonardus Heutz, Dommelen, NL;
Ferdy Migchelbrink, Veldhoven, NL;
Henricus Anita Jozef Wilhelmus Van De Ven, Echt, NL;
Ramo Omerovic, Heerlen, NL;
Emericus Antoon Theodorus Van Den Akker, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention provides a fluid purging system () for an optical element (), comprising a fluid guiding unit arranged to guide a fluid, provided by a fluid supply system, over at least a curved portion of an optical surface () of the optical element. The fluid guiding unit comprises a fluid inlet and a first nozzle unit () for providing a fluid to the optical surface. The fluid guiding unit being formed by at least a first wall portion () and at least a second wall portion (), wherein the second wall portion being configured to face the optical surface and to follow a contour of the optical surface. The second wall portion comprises a second nozzle unit ().