The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Jun. 17, 2020
Lam Research Corporation, Fremont, CA (US);
Adriana Vintila, Wilsonville, OR (US);
Matthew Scott Mudrow, Tigard, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
In an example embodiment, a bidirectional indexing apparatus includes a plurality of bidirectional indexing heads that can operate independently of each other or in concert to adjust a gap between a substrate and a pedestal in a substrate processing chamber. In some embodiments, a bidirectional indexing head comprises a base; a rotatable plate rotatable relative to the base, the rotatable plate including a plurality of profiled pockets each defining a camming surface therein; and a plurality of camming pins, each disposed to act on the camming surface of a respective profiled pocket to move the rotatable plate in a first or second rotatable direction when actuated.