The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2025

Filed:

Jun. 21, 2022
Applicant:

Globalfoundries U.s. Inc., Malta, NY (US);

Inventors:

Arkadiusz Malinowski, Dresden, DE;

Alexander M. Derrickson, Saratoga Springs, NY (US);

Assignee:

GlobalFoundries U.S. Inc., Malta, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 84/40 (2025.01); H01L 21/02 (2006.01); H10D 10/01 (2025.01); H10D 10/60 (2025.01); H10D 30/01 (2025.01); H10D 30/43 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01);
U.S. Cl.
CPC ...
H10D 84/401 (2025.01); H01L 21/02532 (2013.01); H01L 21/02603 (2013.01); H10D 10/061 (2025.01); H10D 10/60 (2025.01); H10D 30/014 (2025.01); H10D 30/031 (2025.01); H10D 30/43 (2025.01); H10D 30/6735 (2025.01); H10D 30/6757 (2025.01); H10D 62/121 (2025.01); H10D 84/0109 (2025.01); H10D 84/038 (2025.01);
Abstract

Disclosed are a forksheet semiconductor structure and a method of forming the structure. The structure can include a dielectric body with a first sidewall and a second sidewall opposite the first sidewall. The structure can include a first transistor, which incorporates first semiconductor nanosheet(s) positioned laterally immediately adjacent to the first sidewall of the dielectric body, and a second transistor, which incorporates second semiconductor nanosheet(s) positioned laterally immediately adjacent to the second sidewall. The first transistor and the second transistor can both be bipolar junction transistors (BJTs) (e.g., PNP-type BJTs, NPN-type BJTs or a PNP-type BJT and an NPN-type BJT). Alternatively, the first transistor can be a BJT (e.g., a PNP-type BJT or an NPN-type BJT) and the second transistor can be a field effect transistor (FET) (e.g., an N-type FET (NFET) or a P-type FET (PFET)).


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