The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Aug. 31, 2022
Applicant:
Macronix International Co., Ltd., Hsinchu, TW;
Inventor:
Chin-Cheng Yang, Kaohsiung, TW;
Assignee:
MACRONIX International Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 21/768 (2013.01);
Abstract
A semiconductor structure including a substrate and a pad structure is provided. The pad structure is located on the substrate. The pad structure includes material pairs and pads. The material pairs are stacked on the substrate to form a stair step structure. Each of the material pairs includes a conductive layer and a dielectric layer located on the conductive layer. Each of the pads includes a conductive pillar and a pad layer. The conductive pillar is embedded in the material pair and is connected to the conductive layer of the material pair. The pad layer is located on the conductive pillar.