The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Mar. 25, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Tomonao Kuwada, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G05D 16/20 (2006.01); G05D 23/19 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); G05D 16/2066 (2013.01); G05D 23/1917 (2013.01);
Abstract
A temperature controller includes a supply line configured to supply a heat medium to at least one control target, a return line configured to return the heat medium from control target, a pump configured to discharge the heat medium to the supply line, a pressure sensor configured to detect a pressure in the supply line disposed immediately after the pump, and a controller. The controller is configured to control the temperature controller to control a discharge pressure of the pump based on a difference between the pressure detected by the pressure sensor and a set value of the discharge pressure of the pump.