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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12405478 B1

PDFFull Text
Date of Patent:
Sep. 02, 2025

Filed:

Jan. 21, 2022

Apparatus for laser annealing and operating method thereof

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sangmin Lee, Yongin-si, KR;

Seulgi Lee, Cheongju-si, KR;

Sungwook Jung, Seoul, KR;

Hyukjun Kwon, Uiwang-si, KR;

Hyangrok Lee, Anyang-si, KR;

Assignees:

EO TECHNICS CO., LTD, Anyang-si, KR;

Samsung Electronics Co., Ltd., Suwon-si, KR;

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Geoffrey S Evans

Int. Cl.
CPC ...
G02B 27/09 (2006.01); B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/064 (2014.01); B23K 26/067 (2006.01); G02B 3/00 (2006.01); G02B 27/10 (2006.01); G02B 27/14 (2006.01); G02B 27/28 (2006.01); B23K 103/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0905 (2013.01); B23K 26/0006 (2013.01); B23K 26/009 (2013.01); B23K 26/0648 (2013.01); B23K 26/0652 (2013.01); B23K 26/0676 (2013.01); G02B 3/0062 (2013.01); G02B 27/0972 (2013.01); G02B 27/106 (2013.01); G02B 27/144 (2013.01); G02B 27/146 (2013.01); G02B 27/283 (2013.01); G02B 27/286 (2013.01); B23K 2103/56 (2018.08); H01L 21/67115 (2013.01);
Abstract

A method of operating an apparatus for laser annealing, includes reducing temporal or spatial coherency of a plurality of laser beams by beam superimposing; and reducing an electric field inner product magnitude of beams having the reduced temporal or spatial coherency by a fly eye lens array to reduce coherency, and/or by modifying a polarization state between the beams by beam superimposing.

Find Patent Forward Citations

Lee, Sangmin. (2025). Apparatus for laser annealing and operating method thereof (U.S. Patent No. 12405478). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12405478

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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