The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Apr. 08, 2022
Applicant:
Shinko Electric Industries Co., Ltd., Nagano, JP;
Inventors:
Shinji Nakazawa, Nagano, JP;
Michio Horiuchi, Nagano, JP;
Assignee:
SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01); H01L 23/467 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67748 (2013.01); H01J 37/32715 (2013.01); H01L 21/68742 (2013.01); H01L 23/467 (2013.01);
Abstract
A substrate detaching apparatus for detaching a substrate attracted to and held onto an attraction surface of an electrostatic chuck includes a moving unit configured to push and move the substrate in a direction parallel to the attraction surface.