The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Jun. 10, 2021
Tokyo Electron Limited, Tokyo, JP;
Yuichi Furuya, Yamanashi, JP;
Hiroki Sakabe, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A trap device including an exhaust gas introduction pipe configured to allow an exhaust gas to flow and be led out from an outlet; a fin member provided in a position where the fin member faces the outlet and is hit by the exhaust gas led out from the outlet; an exhaust path forming member covering at least a portion of the exhaust gas introduction pipe and including an exhaust path configured to exhaust the exhaust gas such that the exhaust gas is turned back, via the fin member, in an opposite direction to a direction of flow of the exhaust gas in the exhaust gas introduction pipe; and a cooling jacket configured to cool the fin member is provided. The fin member includes a fin extending in the opposite direction to the direction of the flow of the exhaust gas in the exhaust gas introduction pipe.