The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2025

Filed:

Sep. 13, 2023
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventors:

Elad Eizner, Ness Ziona, IL;

Amir Shoham, Ness Ziona, IL;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 2021/8848 (2013.01); G01N 2201/063 (2013.01);
Abstract

An optical inspection system, including (a) an illumination optics that is configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; (b) at least one collection optics configured to collect light from the sample as a result of an impingement of the illumination light beam on the sample; (c) at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; (d) multiple polarizers that comprise at least one inhomogeneous polarizer and at least one half-wave plate; and (e) at least one movement unit that is configured to move, under a control of a control unit of the optical inspection system, the at least one inhomogeneous polarizer thereby impacting a polarization of one or more light beams out of the illumination light beam, and the at least one detected light beam.


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