The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Mar. 22, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Masato Kadobe, Iwate, JP;
Hiromi Nitadori, Iwate, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); F04B 37/14 (2006.01); F04B 39/12 (2006.01); F04B 41/06 (2006.01); F16L 9/19 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16L 9/20 (2013.01); F04B 37/14 (2013.01); F04B 39/123 (2013.01); F04B 41/06 (2013.01);
Abstract
A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.