The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
May. 30, 2024
Tokyo Electron Limited, Tokyo, JP;
Dipak Aryal, Austin, TX (US);
Kate Abel, Austin, TX (US);
Takeo Nakano, Nirasaki, JP;
Tamotsu Morimoto, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Embodiments of improved methods are provided to form ordered structures on a surface of a substrate using direct self-assembly (DSA) of ionic liquid crystals (ILCs). More specifically, various embodiments of methods are provided to control the pitch of a layered structure formed on a substrate surface via self-assembly of ILCs having cation head groups, alkyl tail groups and anions. In the embodiments disclosed herein, the pitch of the layered structure is controlled by: (a) controlling the cation/anion charge ratio of the cation head groups and anions included within the ILCs, and/or (b) adding an ionic liquid to a solution comprising the ILCs.