The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Mar. 09, 2022
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Matthew A. Fuller, Colorado Springs, CO (US);
Jeffery J. King, Colorado Springs, CO (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67769 (2013.01); H01L 21/67778 (2013.01);
Abstract
A semiconductor substrate carrying container, such as a front opening unified pod, is configured such that a semiconductor substrate can be accessed and removed from or inserted into an interior space of the container via a rear opening that is located opposite a front opening that also permits removal and insertion therethrough. The removal and insertion via the rear opening can be achieved in any suitable manner including, but not limited to, using an automated mechanism, such as a robot arm, or manually.