The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2025

Filed:

Dec. 05, 2022
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventor:

Luyang Han, Heidenheim, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2804 (2013.01);
Abstract

A method generates a crystalline orientation map of a surface portion of a sample. A crystalline orientation map represents crystalline orientations at a plurality of sample locations of the surface portion. The method comprises recording an image of the surface portion including a central location using particles of a charged particle beam directed to the surface portion and backscattering from the surface portion for each of a plurality of different orientation settings. Each of the orientation settings is defined by an azimuthal angle and an elevation angle under which the charged particle beam is incident onto the central location during the recording of the respective image. The method also includes generating the crystalline orientation map based on the recorded images.


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