The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2025

Filed:

Jun. 10, 2021
Applicant:

Japan Electronic Materials Corporation, Hyogo, JP;

Inventors:

Tatsunori Shimizu, Hyogo, JP;

Tsutomu Shoji, Hyogo, JP;

Yuji Kawasaki, Hyogo, JP;

Tomohiro Kinoshita, Hyogo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 1/06794 (2013.01); G01R 1/07342 (2013.01);
Abstract

Suppresses reflection from a circuit board including a light-transparent insulating film formed on an interlayer wiring to easily identify an alignment mark formed on a probe. The probe card comprises a circuit boardon which an insulating filmand an electrode padare formed and a probeattached onto the electrode pad. The probehas an alignment markidentifiable from an opposite side of the circuit board. The alignment markis positioned outside of the electrode padon the circuit board. The insulating filmis a light-transmissive thin film covering an interlayer wiring. An anti-reflection filmwith lower light transmittance than the insulating filmis formed in some regions on the insulating film. The anti-reflection filmis formed on a position corresponding to the alignment markand a region surrounding the position.


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