The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Nov. 09, 2023
Asmpt Singapore Pte. Ltd., Singapore, SG;
Jinchun Huang, Hong Kong, CN;
Zhenyong Bai, Hong Kong, CN;
Huawei Guan, Hong Kong, CN;
Ping Kong Choy, Singapore, SG;
Ka Shing Kwan, Singapore, SG;
ASMPT SINGAPORE PTE. LTD., Singapore, SG;
Abstract
An apparatus for attenuating vibration of a support structure for supporting a movable module that is drivable to move on the support structure. The support structure is isolated from a base by a resilient vibration isolator. The apparatus includes a force compensation system coupled to the support structure for applying one or more first vibration suppression forces on the support structure for at least partially canceling a reaction force exerted by the movable module when the movable module is driven to move on the support structure, and a sensing system attached to the support structure for measuring a vibration parameter of the support structure, wherein the force compensation system is further configured to apply at least one second vibration suppression force on the support structure according to the measured vibration parameter for attenuating vibration of the support structure.