The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12389508 B1

Date of Patent:

Aug. 12, 2025

Filed:

Aug. 01, 2023

Light source parameter information management method, light source parameter information management apparatus, and computer readable medium

Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Yuji Minegishi, Oyama, JP;

Osamu Wakabayashi, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:

Studebaker Brackett PLLC

Primary Examiner:

Long Nguyen

Int. Cl.

CPC ...

H05B 47/10 (2020.01); H05B 45/50 (2022.01); H05B 47/105 (2020.01); H05B 47/17 (2020.01); H05B 47/19 (2020.01);

U.S. Cl.

CPC ...

H05B 45/50 (2020.01); H05B 47/105 (2020.01); H05B 47/17 (2020.01); H05B 47/19 (2020.01);

Abstract

A light source parameter information management method for managing information on a parameter of a light source used in an exposure apparatus, the method including acquiring priority target parameter information containing an item of a variable that is a priority target parameter prioritized in the operation of the light source, and a target value of the variable, estimating maintenance information based on the priority target parameter information, the maintenance information containing a value representing the life of a consumable in the light source until maintenance of the consumable, and outputting the maintenance information.

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