The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Sep. 20, 2023
Entegris, Inc., Billerica, MA (US);
Brian Wiseman, Glencoe, MN (US);
Russ V. Raschke, Chanhassen, MN (US);
Paul J. Magoon, Colorado Springs, CO (US);
Huaping Wang, Eden Prairie, MN (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.