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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12387946 B1

PDFFull Text
Date of Patent:
Aug. 12, 2025

Filed:

Oct. 05, 2023

Double-sided scrubber for substrate cleaning

Applicant:

Yield Engineering Systems, Inc., Fremont, CA (US);

Inventors:

Rajeev Bajaj, San Jose, CA (US);

Al Stone, Bloomingdale, IL (US);

Assignee:

YIELD ENGINEERING SYSTEMS, INC., Fremont, CA (US);

Attorney:

Finnegan, Henderson, Farabow, Garrett & Dunner, LLP

Primary Examiner:

Michael E Barr

Assistant Examiner:

Ryan L Coleman

Int. Cl.
CPC ...
H01L 21/00 (2006.01); B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 1/32 (2024.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67046 (2013.01); B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 1/32 (2024.01); B08B 3/022 (2013.01); B08B 3/08 (2013.01); H01L 21/02057 (2013.01); H01L 21/67051 (2013.01); B08B 2203/02 (2013.01);
Abstract

A substrate cleaning device includes a double-sided scrubber that directs a liquid to a substrate as it moves back-and-forth between a pair of rotating brushes. The device may also include a first set of nozzles and a second set of nozzles. The first set of nozzles may be configured to spray a first liquid at an interface between the substrate and rotating brushes and the second set of nozzles may be configured to spray a second liquid at the interface as the substrate moves back-and-forth between the pair of rotating brushes.

Find Patent Forward Citations

Bajaj, Rajeev. (2025). Double-sided scrubber for substrate cleaning (U.S. Patent No. 12387946). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12387946

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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