The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Feb. 20, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A reflective optical element (), in particular for an illumination optical unit of a projection exposure apparatus includes: a structured surface () that preferably forms a grating structure (), and a reflective coating () that is applied to the structured surface (). The reflective coating () covers the structured surface () discontinuously, and the reflective optical element () has at least one protective layer () that covers the structured surface () continuously. Also disclosed are an illumination optical unit () for a projection exposure apparatus () including at least one reflective optical element () of this type, to a projection exposure apparatus () including an illumination optical unit () of this type, and to a method for producing a protective layer () on a reflective optical element () of this type.