The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2025

Filed:

Aug. 29, 2022
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Kazuya Fukuhara, Yokkaichi Mie, JP;

Kazuhiro Takahata, Yokohama Kanagawa, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 33/38 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 33/3842 (2013.01); G03F 7/2012 (2013.01); H01L 21/0271 (2013.01); H01L 21/31144 (2013.01); H01L 21/31116 (2013.01); H01L 21/76807 (2013.01);
Abstract

According to one embodiment, a template includes a base material with a first surface at a first level. A first pattern on the template includes first protruding portions in a first region that protrude to a second level beyond the first level, a first recess portion between an adjacent pair of first protruding portions in a central portion of the first region, and a second recess portion between another adjacent pair of first protruding portions in an outer peripheral portion of the first region. A second pattern on the template includes a protrusion portion in a second region outside the first region. The protrusion portion protrudes to a third level. An optical layer is in the first recess portion and at least a portion of a bottom surface of the second recess portion is not covered by the optical layer.


Find Patent Forward Citations

Loading…