The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2025

Filed:

Feb. 17, 2022
Applicant:

Mitutoyo Corporation, Kawasaki, JP;

Inventor:

Hiroki Ujihara, Ibaraki, JP;

Assignee:

Mitutoyo Corporation, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01S 17/34 (2020.01); G01S 7/48 (2006.01);
U.S. Cl.
CPC ...
G01S 17/34 (2020.01); G01S 7/4808 (2013.01);
Abstract

A measurement apparatus including a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes of a main lobe, branch that splits the frequency-modulated laser beam into a reference light, a measurement light, and a monitor light, beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured, extraction circuitry that extracts a signal component including a plurality of self-beat signals based on the main lobe from the monitor light, identification circuitry that identifies a cavity frequency of the optical cavity on the basis of the signal component, and calculation circuitry that calculates a difference between propagation distances between the reference light and the measurement light on the basis of the cavity frequency and the beat signal.


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