The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Mar. 02, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Takumu Iwanaka, Tokyo, JP;
Yoshifumi Sekiguchi, Tokyo, JP;
Toshiaki Kusunoki, Tokyo, JP;
Shin Imamura, Tokyo, JP;
Hajime Kawano, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
Provided are a charged particle detector and a radiation detector capable of obtaining an observation image with correct contrast without saturation even when the number of signal electrons incident on a detector is increased due to an increase in the current of a primary electron beam. The charged particle detector is characterized by having a scintillator () having a signal electron detection surface () for detecting signal electrons emitted when a specimen is irradiated with primary electrons and converting the signal electrons into light, a light detector () having a light detection surface () for detecting the light emitted from the scintillator (), and a light guide () disposed between the scintillator () and the light detector (), wherein the area of the light detection surface () is larger than the area of the signal electron detection surface ().