The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Jan. 31, 2022
Applicant:
Canton Litho Material Technology Inc., Guangzhou, CN;
Assignee:
CANTON LITHO MATERIAL TECHNOLOGY INC., Guangzhou, CN;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); C08F 20/18 (2006.01); C08F 30/08 (2006.01); G03F 7/004 (2006.01); G03F 7/039 (2006.01); G03F 7/075 (2006.01);
U.S. Cl.
CPC ...
G03F 7/038 (2013.01); C08F 20/18 (2013.01); C08F 30/08 (2013.01); G03F 7/004 (2013.01); G03F 7/0045 (2013.01); G03F 7/0388 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); G03F 7/0758 (2013.01);
Abstract
A resin including a highly sequenced copolymer is presented, and the preparation and application of its resist composition is presented. The resist has excellent performance and can promote the development of integrated circuits.