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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12379272 B1

PDFFull Text
Date of Patent:
Aug. 05, 2025

Filed:

Nov. 12, 2021

Apparatus and method for detecting tension abnormality in dicing tape

Applicant:

Tokyo Seimitsu Co., Ltd., Hachioji, JP;

Inventor:

Kiyotaka Kizaki, Tokyo, JP;

Assignee:

TOKYO SEIMITSU CO., LTD., Tokyo, JP;

Attorneys:

Fattibene and Fattibene, LLC

Paul A. Fattibene

Primary Examiner:

Peter J Macchiarolo

Assistant Examiner:

Monica S Young

Int. Cl.
CPC ...
G01L 5/04 (2006.01); H01L 21/20 (2006.01); H01L 21/26 (2006.01); H01L 21/30 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G01L 5/04 (2013.01); H01L 21/6836 (2013.01); H01L 21/20 (2013.01); H01L 21/26 (2013.01); H01L 21/30 (2013.01); H01L 21/67242 (2013.01);
Abstract

An apparatus and a method for detecting a tension abnormality in a dicing tape, to quantitively determine whether or not tension of the dicing tape is appropriate and accurately detected. A tension abnormality detecting apparatusincludes an air micrometerthat measures, displacement of a dicing tape DT occurring when air is blown to a measurement point P to which a workpiece W is not affixed. A determination unitdetermines the tension of the dicing tape DT is appropriate when the tension of the dicing tape DT at the measurement point P belongs in a previously set proper range and determines that the tension of the dicing tape DT is abnormal when the tension of the dicing tape DT at the measurement point P does not belong in the proper range.

Find Patent Forward Citations

Kizaki, Kiyotaka. (2025). Apparatus and method for detecting tension abnormality in dicing tape (U.S. Patent No. 12379272). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12379272

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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