The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Nov. 04, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 21/08 (2006.01); C25D 17/00 (2006.01); C25D 17/02 (2006.01); C25D 17/06 (2006.01);
U.S. Cl.
CPC ...
C25D 21/08 (2013.01); C25D 17/005 (2013.01); C25D 17/02 (2013.01); C25D 17/06 (2013.01);
Abstract
A plating module includes: a plating tank configured to accommodate a plating solution; a substrate holder configured to hold a substrate with a surface to be plated facing downward; a rotation mechanism configured to rotate the substrate holder; a contact member-having a substrate contact point-for contacting an outer peripheral portion of the surface to be plated of the substrate held by the substrate holder and a main body-extending above with respect to the substrate contact point-, and attached to the substrate holder; and a contact cleaning memberfor discharging a cleaning liquid toward the main body-of the contact member-from a lower side of the substrate holder.