The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Nov. 22, 2021
Elevated Materials Us Llc, Santa Clara, CA (US);
Alejandro Sevilla, Miami, FL (US);
Wei-Sheng Lei, San Jose, CA (US);
Girishkumar Gopalakrishnannair, San Jose, CA (US);
Ezhiylmurugan Rangasamy, San Jose, CA (US);
David Masayuki Ishikawa, Mountain View, CA (US);
Subramanya P. Herle, Mountain View, CA (US);
Elevated Materials US LLC, Santa Clara, CA (US);
Abstract
Exemplary processing methods may include translating a lithium film beneath a first showerhead. The methods may include introducing an oxidizer gas through the first showerhead onto the lithium film. The methods may include forming an oxide monolayer on the lithium film. The oxide monolayer may be or include the oxidizer gas adsorbed on the lithium film. The methods may include translating the lithium film beneath a second showerhead after forming the oxide monolayer. The methods may include introducing a carbon source gas through the first showerhead onto the lithium film. The methods may also include converting the oxide monolayer into a carbonate passivation layer through reaction of the oxide monolayer with the carbon source gas.