The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Feb. 03, 2022
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Marinus Augustinus Christiaan Verschuren, Helmond, NL;
Thomas Poiesz, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 14/50 (2006.01); G03F 7/00 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68721 (2013.01); C23C 14/50 (2013.01); G03F 7/70708 (2013.01); H01L 21/67028 (2013.01); H01L 21/6833 (2013.01);
Abstract
A substrate restraining system comprising: a substrate table and a plurality of circumferentially arranged restrainers each comprising a spring, wherein the spring has a proximal end and a distal end, wherein the distal end of the spring is radially displaceable, and wherein a base of the proximal end of the spring is fixed to the substrate table at a fixing location.