The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Dec. 16, 2022
Fasford Technology Co., Ltd., Minami-Alps, JP;
Tsuyoshi Yokomori, Minami-Alps, JP;
Tatsuyuki Okubo, Minami-Alps, JP;
Yuki Nakui, Minami-Alps, JP;
Hiroshi Maki, Minami-Alps, JP;
Akira Saito, Minami-Alps, JP;
Naoki Okamoto, Minami-Alps, JP;
Fasford Technology Co., Ltd., Minami-Alps, JP;
Abstract
A semiconductor manufacturing apparatus includes a thrust-up unit having a plurality of blocks in contact with a dicing tape, a head having a collet absorbing the die and capable of being moved up and down, and a control section controlling the operation of the thrust-up unit and the head. The thrust-up unit can operate each of the plurality of blocks independently. The control section configures the thrust-up sequences of the plurality of blocks in a plurality of steps, and controls the operation of the plurality of blocks on the basis of a time chart recipe capable of setting the height and the speed of the plurality of blocks for each block and in each step.