The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2025

Filed:

Jul. 07, 2023
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Thomas Groezinger, Steinheim, DE;

Semih Oeztuerk, Schorndorf, DE;

Erik Loopstra, Ederheim Huernheim, DE;

Anton Haase, Aalen, DE;

Assignee:

CARL ZEISS SMT GMBH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/00 (2021.01); G01N 21/33 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70825 (2013.01); G01N 21/33 (2013.01); G02B 7/005 (2013.01); G03F 7/70258 (2013.01);
Abstract

Provided for herein is a device that includes a first base support rotatable about a first rotational axis perpendicular to a rest surface of the first base support; a second base support arranged on the first base support and rotatable about a second rotational axis perpendicular to the rest surface of the first base support; at least one third base support arranged on the second base support and rotatable about a third rotational axis perpendicular to the rest surface of the first base support; and a supporting element is arranged on the third base support and including a holding surface for holding at least one optical element, the holding surface being rotatable about a rotational axis perpendicular to the holding surface.


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