The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Apr. 19, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Neil Martin Paul Benjamin, Palo Alto, CA (US);
John Stephen Drewery, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04F 5/00 (2006.01); F04F 5/16 (2006.01); F24F 7/06 (2006.01); H01L 21/67 (2006.01); F24F 110/20 (2018.01); F24F 110/40 (2018.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); F04F 5/16 (2013.01); F24F 7/06 (2013.01); H01L 21/67248 (2013.01); F24F 2110/20 (2018.01); F24F 2110/40 (2018.01);
Abstract
A temperature control system comprises an enclosure having an intake aperture and an exhaust aperture. An air amplifier disposed inside the enclosure. A gas supply line is connected to the air amplifier through the intake aperture. The gas supply line supplies a first flow of gas to the air amplifier. The air amplifier amplifies the first flow of gas to a second flow of gas inside the enclosure. The second flow of gas exits through the exhaust aperture.