The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 22, 2025

Filed:

Sep. 15, 2022
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventor:

Yehuda Zur, Tel-Aviv, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/22 (2006.01); H01J 37/147 (2006.01); H01J 37/317 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3178 (2013.01); C23C 14/221 (2013.01); H01J 37/1474 (2013.01); H01J 2237/006 (2013.01); H01L 21/28568 (2013.01);
Abstract

A gas injection nozzle that includes an elongated gas conduit that comprises: a first gas conduit segment configured to be coupled with a gas reservoir; a second gas conduit segment fluidly coupled to the first gas conduit segment and defining a downward curve of the elongated gas conduit; a third gas conduit segment defining an upward curve of the elongated gas conduit that extends to a sealed end and is disposed in a mirrored relationship with at least a portion of the second gas conduit; and a central gas conduit segment coupled between the second and third gas conduit segments, the central gas conduit segment having a first aperture formed in an upper surface of the central gas conduit and a second aperture, larger than the first aperture, formed in a lower surface of the central gas conduit directly across from the first aperture, wherein the elongated gas conduit has a first diameter along a portion of its length that includes at least the second, third and central gas conduit segments and wherein the central gas conduit segment includes a substantially horizontal portion that extends on each side of the first and second apertures for a distance that is at least twice the first diameter of the gas conduit.


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