The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Apr. 14, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Katsuhiko Kimura, Tokyo, JP;
Yoshihiro Satou, Tokyo, JP;
Masaya Yamamoto, Tokyo, JP;
Ayumi Tomiyama, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A surface inspection device () according to the present invention comprises: a plate-shaped sample holding member () which can hold a sample (); a spindle motor () for rotating the sample holding member (); a turntable () which is fixed to the spindle motor () and rotated by the spindle motor (); a frame () to which the spindle motor () is fixed; a plurality of support members () each having one end fixed to the sample holding member () and the other end fixed to the turntable (), the support members supporting the sample holding member () such that the sample holding member is displaceable in a focus direction which is the height direction with respect to the turntable (); and a sample drive unit () which displaces the sample holding member () in the focus direction with respect to the turntable (). This surface inspection device () can accurately drive the sample () in the focus direction.