The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Dec. 06, 2021
Solayer Gmbh, Karlstein, DE;
Dzmitry Hrunski, Aschaffenburg, DE;
Markus Kress, Mühlheim am Main, DE;
Marco Seibert, Langen, DE;
Florian Peter Schwarz, Aschaffenburg, DE;
Solayer GmbH, Karlstein, DE;
Abstract
The invention relates to a diaphragm assembly of an aperture diaphragm for delimiting the coating region which is operative in the deposition of a layer and to a sputtering device which uses the diaphragm assembly. The diaphragm assembly comprises a main part () which has a passage () delimited by a passage edge. The aim of the invention is to design the diaphragm opening to be temporally and geometrically variable in situ. This is achieved in that the diaphragm assembly has at least one diaphragm plate (″) which is assembled on the main part () so as to be movable in front of the passage () and back. The diaphragm assembly additionally comprises a movement device which is operatively connected to the diaphragm plate (″) in order to carry out the movement thereof.