The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Sep. 06, 2021
Hansol Chemical Co., Ltd., Seoul, KR;
Hyun-Kee Kim, Jeollabuk-do, KR;
Cheol-Wan Park, Jeollabuk-do, KR;
Ki-Yeung Mun, Jeollabuk-do, KR;
Ee-Seul Shin, Ulsan, KR;
Eun-Jeong Cho, Jeollabuk-do, KR;
Jang-Hyeon Seok, Sejong-si, KR;
Jung-Woo Park, Seoul, KR;
HANSOL CHEMICAL CO., LTD., Seoul, KR;
Abstract
The present disclosure relates to a novel Group 4 metal element-containing compound having excellent thermal stability, a precursor composition including the compound, and a method for manufacturing a thin film using the precursor composition. The novel Group 4 metal element-containing compound according to the present disclosure and the vapor deposition precursor composition including the compound can have excellent thermal stability, realize thin film deposition in a wide temperature range, and reduce residues caused by heat loss, thereby preventing side reactions in a process. Additionally, the vapor deposition precursor composition according to the present disclosure can realize uniform thin film deposition, thereby securing excellent physical properties of the thin film.