The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2025

Filed:

Nov. 02, 2022
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Laurent Grenouillet, Grenoble, FR;

Jean Coignus, Grenoble, FR;

Elisa Vianello, Grenoble, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 80/00 (2023.01); H10B 99/00 (2023.01);
U.S. Cl.
CPC ...
H10B 99/00 (2023.02);
Abstract

A method for co-manufacturing a FeRAM and an OxRAM includes depositing a layer of first electrode carried out identically for a zone Zand a zone Z; depositing a layer of hafnium dioxide-based active material carried out identically for Zand Z; depositing a first conductive layer carried out identically for Zand Z; making a mask at Z, leaving Zfree; removing the layer at Z, with Zbeing protected by the mask; removing the mask at Z; and depositing a second conductive layer in contact with the layer at Zand in contact with the layer at Z, the material of the layer being chosen to create oxygen vacancies in the active layer and depositing a third conductive layer carried out identically for Zand Z


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