The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2025

Filed:

Nov. 18, 2021
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

John J. Flanagan, Hillsboro, OR (US);

Nathaniel Kurtz, Hillsboro, OR (US);

Ashley Tilson, Hillsboro, OR (US);

Phillip Parker, Hillsboro, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); G01N 23/20058 (2018.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); G01N 23/20058 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/2823 (2013.01);
Abstract

Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.


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Flanagan, John. (2025). Method and system for automatic zone axis alignment (U.S. Patent No. 12362135). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12362135

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